NONE 20260424082646217 wseas/wseas content-registration-form+ja@crossref.org content-registration-form International Journal of Applied Sciences & Development 2945-0454 Dr. Tarkeshwar Patil Independent Scientist A-1/101, Jagruti Society, Bhatwadi, Ghatkopar (West), Mumbai – 400084. INDIA As there is hardly any work carried out on effect of growth variations on Silicon Nanocrystals / nanostructures, we experimented and found that as the deposition rate is increased the structures the height of the nanostructures also increased. Further the appearance of the nanostructures and their evolution with annealing is being reported for the first time. 04 24 2026 04 24 2026 48 6 https://creativecommons.org/licenses/by/4.0/deed.en_US 10.37394/232029.2026.5.6 https://wseas.com/journals/asd/2026/a12asd-006(2026).pdf V. Švrček, A. Slaoui, J.-C. Muller, Silicon nanocrystals as light converter for solar cells, Thin Solid Films, Volumes 451–452, 2004, Pages 384-388, ISSN 0040-6090, https://doi.org/10.1016/j.tsf.2003.10.133. Elliman R.G., Wilkinson A.R., Smith N., Spooner M.G., Weijers T.D.M., Light Emission from Silicon Nanocrystals - Size Does Matter!, Journal of the Korean Physical Society, 45, (2004). Basa P., Petrik P., Fried M., Dobos L., Pe'cz B., To'th L., Si nanocrystals in silicon nitride: An ellipsometric study using parametric semiconductor models, Physica E, 38, pp. 76-79, (2007) H. J. Cheong, J. H. Kang, J. K. Kim, and K. Yong, “Growth of Highly Luminescent Silicon Nanocrystals by Rapid Thermal Chemical Vapor Deposition,” KEM, vol. 277–279, pp. 977–982, Jan. 2005, doi: 10.4028/www.scientific.net/kem.277-279.977. Chen R., Hu Y., Li X., He J., Zhang S. Silicon quantum dots prepared by electrochemical etching and their application in solar cells (2023) Journal of Materials Science: Materials in Electronics, 34 (13), art. no. 1105 DOI: 10.1007/s10854-023-10513-8 P. Mahajan, T. C. Patil, and S. Chakrabarti, “HWCVD-grown Silicon Nanocrystals : A study of the effect of annealing on structures evolved with varying growth rates,” MRS Proceedings, vol. 1178, pp. 1178-AA06-13, 2009. doi:10.1557/PROC-1178-AA06-13 T. C. Patil and S. Chakrabarti, "Growth mechanism for vertical growth of nanopillars in progressive annealed HWCVD grown silicon nanostructures," 2009 4th International Conference on Computers and Devices for Communication (CODEC), Kolkata, India, 2009, pp. 1-4. Tarkeshwar C. Patil, Prantik Mahajan, S. Chakrabarti, Effect of progressive annealing on Silicon Nanostructures grown by Hot Wire Chemical Vapor Deposition, Superlattices and Microstructures, Volume 48, Issue 2, 2010, Pages 190-197, ISSN 0749-6036, https://doi.org/10.1016/j.spmi.2010.05.008. Vanzetti, L., Barozzi, M., Iacob, E., Bersani, M., Pucker, G. and Bellutti, P. (2008), Combined XPS, SIMS, and AFM analyses of silicon nanocrystals embedded in silicon oxide layers. Surf. Interface Anal., 40: 543-546. https://doi.org/10.1002/sia.2674