Krupa M. M., "Silicon Carbide Films as Protective and Optical Coatings," International Journal of Chemical Engineering and Materials, vol. 3, pp. 55-58, 2024, DOI:10.37394/232031.2024.3.7
Krupa M. M.. Silicon Carbide Films as Protective and Optical Coatings.
International Journal of Chemical Engineering and Materials. 2024;3:55-58. 10.37394/232031.2024.3.7
International Journal of Chemical Engineering and Materials
E-ISSN: 2945-0519
Volume 3, 2024
Silicon Carbide Films as Protective and Optical Coatings
Author:
Abstract: The paper presents the results of experimental studies of amorphous silicon carbide films as a material for applying protective coatings, as well as for creating a submicron structure on the surface of optical elements by the method of cutting the film with laser radiation. The technology for obtaining amorphous SiC films is described. The degradation time of the film cutting of the TbFe film with the cutting protective coatings was measured and it was shown that amorphous SiC films provide more effective protection of TbFe films from oxidation compared to $$SiO_{2}$$ films.
Keywords:
amorphous silicon carbide films, protective coatings, laser technology for forming a submicron structure in films
Pages: 55-58 DOI: 10.37394/232031.2024.3.7WSEAS Transactions on International Journal of Chemical Engineering and Materials, E-ISSN: 2945-0519, Volume 3, 2024, Art. #7
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